The probe station is distinguished from operation: manual, semi-automatic, and fully automatic

　　From the functional point of view, there are: temperature control probe station, vacuum probe station (ultra-low temperature probe station), RF probe station, LCD flat panel probe station, Hall effect probe station, surface resistivity probe station

　　Probe station, probe test station x-y workbench classification

Looking at the functions and composition of automatic probe test benches at home and abroad, they are similar in function and composition, that is, they are mainly composed of xy-direction workbench, programmable slide table, probe card/detector bracket, dot machine, edge probe, operating handle, etc. And equipped with a communication interface connected with the tester (TESTER). But according to the difference of the structure of the xy workbench, it can be divided into two categories, namely: the plane motor type xy workbench (also called the magnetic air floating workbench) represented by the American EG company, and the automatic probe test bench in Japan and The xy workbench type automatic probe test bench with precision ball screw pair and linear guide structure produced in European countries. Because the structure of the x-y workbench is very different, its use and maintenance cannot be generalized, and should be treated differently.

Maintenance and maintenance of probe station x-y worktable

　　 Whether it is an automatic probe test bench or an automatic probe test bench, the x-y workbench is the core part of it. There are data showing that more than half of the failures of the probe test bench are the failures of the xy workbench, and many of the workbench failures are caused by improper maintenance or blind adjustments, so the maintenance and maintenance of the workbench is particularly important . This article only introduces the maintenance and maintenance of the x-y workbench of the automatic probe test bench.

　　2.1 Maintenance and maintenance of plane motor x-y stepping table

　　Planar motor is composed of stator and mover. Compared with traditional stepping motor, its particularity is to unfold the stator. The stator is the basic platform.

　　 There is a layer of air cushion between the mover and the stator, the mover floats on the air cushion, and the programmable platform is installed on the mover. The x-y worktable of this structure has no wear and long service life because there is no relative friction between the mover and the stator.

In the stator processing process, the manufacturer uses machining methods to process a number of wire slots on a flat iron casting according to different design requirements such as resolution. The distance between the wire slots is called the tooth of the planar motor. According to different subdivision control methods, the stator can realize the step movement with the help of the air cushion between the plane stator and the mover according to the programmed operating program. Damage to the stator will directly affect the stepping accuracy of the workbench and the service life of the equipment, and serious damage will cause the equipment to be unusable and scrapped.

Since the stator and mover of the planar motor are completely exposed to the air, the humid environment and improper maintenance for a long time will easily cause the stator to rust. In addition, collisions of heavy objects and scratches from sharp objects will cause damage to the stator. Damage, which affects the stepping accuracy and service life of the planar motor. For the rusted stator, you can gently polish the surface of the stator in one direction with natural oilstone, and then clean it with a cotton ball dipped in kerosene. The whole process should be very careful. , Do not make the surface of the stator uneven. In addition, rust removers that are not corrosive and do not damage the stator can also be used to remove rust. For the stator under normal conditions, regular dust removal and cleaning work should be done. When cleaning, the air should be opened to allow the mover to move. The method is to use absorbent cotton dipped in a little more than 95% absolute ethanol, gently wipe the surface of the stator, and then use a special tool to pry. Start the starter with the same method as before. Gently rub the surface of the mover. There are several air holes on the surface of the mover. They are the outlet holes of the compressed air between the stator and the mover. Open the small hole and insert the vent nut to check whether there is any impurities blocking the vent. After the treatment is completed, the original state of the embedded vent nut should be restored. It is important to note that the mover cannot be pulled forcibly when compressed air is not added, so as to avoid damage to the stator and mover. Planar motors should be used in an environment with an ambient temperature of 15-25 ℃ and a relative humidity of less than 50%. The compressed air required for it must be dried and filtered and the temperature difference with the ambient air should be less than 5 ℃, and the air pressure should be 0.4±0.04MPa.

　　2.2 Maintenance and maintenance of ball screw pair and guide rail structure x-y workbench

　　Compared with the flat motor workbench, the workbench structure of the lead screw guide rail structure is more complicated. The workbench is composed of two parts: the upper layer (x direction) and the lower layer (y direction). The worktable is driven by two stepping motors respectively in x and y directions to drive the worktable with precision ball screws. The guiding part adopts precision linear rolling guides. Because all the moving parts adopt rolling function parts, it has the characteristics of high transmission efficiency, small friction torque and long service life. The workbench with this structure should be placed in an environment where the temperature is 23±3 ℃, the humidity is ≤70%, and there is no harmful gas. The ball screw and linear guide should be regularly filled with precision instrument oil, but not too much. It is worth pointing out that, During the assembly process of the workbench with this structure, the linearity of the linear guide, the verticality between the upper and lower workbenches, the repeatability of the workbench, and the positioning accuracy are all adjusted with professional instruments and meters. Users generally cannot It is easy to change, and it is difficult to restore to the original state once blindly adjusted. Therefore, the workbench that needs to be adjusted should be completed by a professional manufacturer or a trained professional.

　　 Probe Station High-precision Probe Station

　　The world’s number one shipment model currently absorbs the latest technology such as OTS, QPU and TTG related technologies. This new high-precision system provides a guarantee for the next generation of miniaturized designs and a variety of test conditions.

　　Feature 1: OTS-nearest position alignment system (optical target alignment) 　OTS guarantees the accuracy of its absolute position by measuring the relative position of the camera. This is a very eye-catching technology, derived from Tokyo's precise measurement technology. OTS realizes an optical alignment system based on itself.

Feature 2: QPU-high rigidity silicon wafer carrier (quadratic system) 　In order to effectively achieve the accuracy of the contact position, it is very important that the rigidity of each part of the wafer carrier is consistent. UF3000 uses a new 4-axis mechanical conversion device ( QPU), to achieve high rigidity, high stability of contact.

　　Probe station feature 3: loading parts

　　The test environment that satisfies the customer, can provide the usual 8", 12" and basic inspection units starting from the front. It is also ready for the application of automatic material conveying system.

　　Probe station feature 4: TTG (just one point)

　　 More convenient operation, UF3000 adopts one tap on the display, the related screen will switch to the new position for display. The related settings are very convenient. The display mode of the screen can also be defined by the customer.